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A state‑of‑the‑art edited volume covering the challenges and solutions for signal measurement and estimation at micro‑ and nano‑scales. It presents techniques applicable to micromanipulation, micro‑assembly (MEMS/MOEMS/NEMS), robotic micro‑ and nano‑systems, thin-film and surface‑force sensing, and force/parameter estimation in scanning‑probe and other nanoscale devices. The book links signal‑processing methods, sensor integration, and control schemes — making it a key reference for researchers and engineers working on micro/nano metrology, sensing, and control systems.

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245: $a: Signal Measurement and Estimation Techniques for Micro and Nanotechnology
245: $b:
082: $a:
100: $a: Cédric Clévy & Micky Rakotondrabe & Nicolas Chaillet
650: $a: Engineering
250: $a:
440: $v:
250: $b: Springer Science & Business Media
250: $c: 2011
020: $a: 9781441999450
300: $a: 242