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A comprehensive introduction to microelectromechanical systems (MEMS) as applied to microwave and RF communications. The book integrates concepts from integrated-circuit fabrication, materials science, mechanical engineering, and microwave electronics to explain MEMS device physics, actuation mechanisms, switch and resonator design, and their application in microwave circuits and wireless systems. It also covers fabrication technologies, simulation/design techniques, and evaluations of the potential and limitations of MEMS in communications equipment — making it a foundational resource for engineers and graduate students working on RF/MEMS systems.

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245: $a: Introduction to Microelectromechanical Microwave Systems, Second Edition
245: $b:
082: $a:
100: $a: Héctor J. De Los Santos
650: $a: Electrical Engineering
250: $a:
440: $v:
250: $b: Artech House
250: $c: 2004
020: $a: 9781580538725
300: $a: 221