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245: $a: Introduction to Microelectromechanical Microwave Systems
245: $b:
082: $a:
100: $a:Hector J. De Los Santos
650: $a:MEMS fabrication and device technologies as applied to RF/microwave wireless communications systems; Inc
250: $a:
440: $v:
250: $b:
250: $c: 2004
020: $a:
300: $a: