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A comprehensive reference on the reliability and manufacturability of micro‑electromechanical systems (MEMS). The book addresses failure modes and mechanisms in MEMS, lifetime prediction, in‑use failures, root‑cause and failure analysis, testing and qualification procedures, and continuous‑improvement strategies such as design‑for‑reliability (DfR). Intended for engineers, researchers and product developers, it offers a systematic framework for designing, testing, and manufacturing MEMS devices with robust reliability across their lifecycle

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245: $a: MEMS Reliability
245: $b:
082: $a:
100: $a: Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea
650: $a: Engineering
250: $a:
440: $v:
250: $b: Springer
250: $c: 2010
020: $a: 978‑1‑4419‑6017‑7
300: $a: 978